关键词: 氮化硅涂层, 失效, 改性

Abstract: As releasing agent，silicon nitride（Si3N4） coating is an indispensable material for photovoltaic silicon ingot production. The purpose of this study is to propose a comprehensive understanding of the invalidation mechanism of the Si3N4 coating and to present an improved Si3N4 coating for the new-typed multi-crystalline silicon（mc-silicon） casting.It was found that the carbonization of the Si3N4 could be a main invalidation cause of the Si3N4 coating，as it led to decreasing of non-wettability between the coating and silicon melt.The reinforced Si3N4 coating prepared with improved sol-gel（SG） method and surface carbon-free treatment showed high adhesion strength and improved non-wettability，which could meet the demands of the new-typed mc-silicon casting very well.

Key words: silicon nitride coating, invalidation, modification