分离三氯氢硅中甲基二氯硅烷的研究进展

doi:10.11962/1006-4990.2020-0217

Abstract

Abstract:

The content of methyl dichlorosilane in trichlorosilane would seriously affect the quality of polysilicon,therefore,the control of methyl dichlorosilane has been significant on the quality of polysilicon.The effectual removal process of methyl dichlorosilane impurity including conventional distillation,adsorption,reaction distillation and extractive distillation method was emphatically summarized.Advantages and disadvantages of these above methods were compared and analyzed.Adsorption and reactive distillation process were effective separation technology of methyl dichlorosilane.Furthermore,extractive distilla-tion has been an important research field in separation of methyl dichlorosilane.Finally,the development trends of those separation process was prospected.

Key words: trichlorosilane, methyl dichlorosilane, adsorption, reactive distillation, extractive distillation

CLC Number:

TQ127.2

Yang Dian,Wang Fang,Wan Ye,Sun Qiang,Zhang Zheng,Shi Qinghe. Research progress on separation process of methyl dichlorosilane from trichlorsilane[J]. Inorganic Chemicals Industry, 2021, 53(3): 30-33.

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Inorganic Acid-Base-Salt Committee of CIESC

Research progress on separation process of methyl dichlorosilane from trichlorsilane

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