关键词: 三氯氢硅, 硅, 氯化氢

Abstract: Production technology and research progress of trichlorosilane at home and abroad were reviewed. Improvement methods for trichlorosilane production technology were put forward.The preparation methods of trichlorosilane mainly include silicon-hydrogen chloride method and silicon tetrachloride hydrogenation method,but the former was more mature than the latter.The key points for the production of trichlorosilane are adding high-efficient catalyst,optimizing the distillation purification process,and adopting new technology to recover tail gas,so as to improve the yield and quality of trichlorosilane and reduce cost at the same time.

Key words: trichlorosilane, silicon, chlorine hydride