无机盐工业
主管:中海油天津化工研究设计院有限公司
主办:中海油天津化工研究设计院有限公司
   中海油炼油化工科学研究院(北京)有限公司
   中国化工学会无机酸碱盐专业委员会
ISSN 1006-4990 CN 12-1069/TQ

无机盐工业 ›› 2013, Vol. 45 ›› Issue (2): 33-.

• 论文 • 上一篇    下一篇

以四氯化硅水热法合成高纯微米级石英晶体

张保川1,薛 屺1,张 进1,刘玉红2 ,邓洪斌1   

  1. 1.西南石油大学材料科学与工程学院,四川成都 610500;2. 峨眉半导体材料厂
  • 出版日期:2013-02-10 发布日期:2013-02-21

Synthesis of high purity micron-sized quartz from SiCl4 by hydrothermal method

Zhang Baochuan1,Xue Qi1,Zhang Jin1,Liu Yuhong2,Deng Hongbin1   

  1. 1. School of Materials Science and Engineering,Southwest Petroleum University,Chengdu 610500,China;
    2.Emei Semiconductor Material Factory
  • Online:2013-02-10 Published:2013-02-21

摘要: 采用水热法,以多晶硅副产物四氯化硅为原料,碳酸钠为矿化剂,研究了不同温度下石英晶体的合成。并利用X射线衍射仪(XRD)、扫描电镜(SEM)和能谱仪(EDS)对其物相结构、形貌和成分进行了表征。结果表明,合成的石英晶体为典型的低温α-石英,呈棱柱状轴向生长;随着温度的升高,晶粒尺寸逐渐增大,在220 ℃下制备得到的晶粒最大,平均粒径为8 μm左右;但当温度为230 ℃时,制备的石英晶体的晶粒反而变小。

关键词: 石英晶体, 四氯化硅, 水热法, 高纯 

Abstract: Quartz crystal was synthesized from silicon tetrachloride of polysilicon by-product by hydrothermal method with anhydrous sodium carbonate as mineralizer at different reaction temperatures.XRD,SEM,and EDS were used to characterize the structure,morphology,and chemical components of the as-prepared quartz crystals.Results showed that the crystal phase of the as-prepared quartz was typical low-temperature α-SiO2,which was prismatic and grew in the direction of axial;the size of quartz crystal increased gradually with the increasing of reaction temperature,appeared to have the maximum size at  220 ℃,and average particle size was about 8 μm;but when reaction temperature reached 230 ℃,the size of α-SiO2 crystal became smaller.

Key words: quartz crystal, silicon tetrachloride, hydrothermal method, high-purity

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