关键词: 废砂浆, 硅, 碳化硅, 回收

Abstract: The source,composition,and properties of drained slurry generated by cutting silicon crystal were introduced.Present status and related technologies of drained slurry recycling at home and abroad were also summarized.According to the degree of maturation of existing drained slurry recovering technologies and the utilization of silicon in drained slurry,the existing recycling technologies may be classified into three categories:1) General recovery technology,i.e.only recovering SiC abrasives and PEG cutting fluids without silicon powder;2) High efficiency recovery technology,i.e.recovery of SiC abrasives,PEG cutting fluids,and silicon powder in drained slurry at the same time;3) Indirect recovery technology,i.e.preparation of chemical products from silicon powder by taking advantage of the chemical stability of SiC,then silicon powder in drained slurry can be efficiently used.Problems may be faced in recycling process were analyzed and suggestions for the future study in this aspect were also proposed. 

Key words: drained slurry, silicon, silicon carbide, recovery