两步烧结法对AlN原料提纯工艺的研究

doi:10.19964/j.issn.1006-4990.2024-0367

Abstract

Abstract:

Aluminum nitride（AlN） crystal，as one of the representatives of ultra-wideband semiconductor materials，has excellent properties such as large bandwidth，high thermal conductivity，and high breakdown field strength，which has important applications in the fields of deep-ultraviolet optoelectronic devices and high-power electronic devices.During the growth process of AlN crystals，the high O and C content in the AlN source material lead to the high concentration of defects inside the crystals or the growth of polycrystals，which will affect the quality of the AlN single crystals.In this paper，a two-step sintering process was proposed to purify the AlN source material，and the sintered samples were characterized by scanning electron microscope（SEM）、oxygen，nitrogen，and hydrogen gas analyzer、carbon and sulfur gas analyzer.The SEM results showed that the particle size of the AlN powder was increased from 1~3 μm to about 100 μm，the specific surface area was reduced，and the adsorption of the O impurities was reduced，and the sintered AlN particles had good crystallinity.The results of oxygen，nitrogen and hydrogen gas analyzer、carbon and sulfur gas analyzer showed that the O impurity content was reduced from 7 900 μg/g to 640 μg/g，and the C impurity was reduced from 420 μg/g to 57 μg/g.In summary，the two-step sintering process was an effective way to control the specific surface area of the AlN source material，which was capable of effectively removing the O，C and other impurities in the AlN source material，and improved the crystalline quality of the AlN source material，laying a foundation for the growth of high-quality AlN crystal.

Key words: AlN source material, purification, sintering process, oxygen impurities, carbon impurities

CLC Number:

TQ133.1

LÜ Lingshuang, CAO Wenhao, YU Ruixian, WANG Shouzhi, WANG Guodong, ZHU Yajun, DU Jiachen, XU Xiangang, ZHANG Lei. Research on purification process of AlN source material by two-step sintering method[J]. Inorganic Chemicals Industry, 2024, 56(12): 51-55.

Figures/Tables 6

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样品	C含量/（μg·g^-1）	O含量/（μg·g^-1）
初始样品	420	7 900
样品1	100	820
样品2	57	640
样品3	240	790

National Inorganic Salts Information Center

Inorganic Acid-Base-Salt Committee of CIESC

Research on purification process of AlN source material by two-step sintering method

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