关键词: 四氟化硅, 氟硅酸, 氟硅酸盐, 制备工艺

Abstract:

SiF₄ is used as a raw material for the production of polycrystalline silicon and its derivatives.With the development of information technology and the advancement of silicon-based industry,the demand for SiF₄ is increasing. Meanwhile,the research on production process of SiF₄ has attract more and more attention.Four methods for preparing SiF₄,such as synthetic method of substance containing Si and substance containing F group,hexafluorosilicate pyrogenetic method,hexafluorosilicic acid method and sulfuric acid method,were introduced in details. The research progress in production process of silicon tetrafluoride at home and abroad was summarized.The characteristics of the preparation processes were discussed.The present research showed that the SiF₄ preparation process should develop in the direction of environmental protection,energy saving and high yield.

Key words: silicon tetrafluoride, fluorosilicic acid, hexafluorosilicate, preparation process