关键词: 四氟化硅, 氟硅酸, 氢氟酸, 氟气

Abstract: Silicon tetrafluoride is an important raw material in the electronics industry.Its demand gradually increases with the rapid development of polysilicon and other industries.Applications and market conditions of silicon tetrafluoride were introduced in detail.Four main production methods，such as fluorine synthesis method，fluorosilicate pyrolysis method，sulfuric acid method，and direct hydrofluoric acid reaction method，were elaborated in detail.The principles of production， process flows and research situations of the four methods were discussed.Furthermore，their advantages and disadvantages were also evaluated.According to the present market situation analysis，Chinese silicon tetrafluoride needs to move into the development of high-end products，in order to adapt to the market demand and to participate in the international competition.

Key words: silicon tetrafluoride, fluosilicic acid, hydrofluoric acid, fluorine