锑掺杂量对ATO薄膜结构及光、电性能的影响

Abstract

Abstract: Using sol-gel method and with SnCl₄ and SbCl₃as raw materials,antimony doped tin oxide (ATO) films with different Sb doping amounts were synthesized. Microstructure,film morphology,transmission,and sheet resistance were characterized by XRD,FESEM,UV-visible spectroscopy,and four-probe resistivity/square resistance tester,and the effects of Sb doping amounts on crystalline microstructure,crystal size,transmission,and conductivity properties of the ATO films were investigated systematically.Results showed that the prepared ATO films had tetragonal cassiterite structure and the preferred orientation was observed as (110)plane,the average crystal size was less than 26 nm,and its sheet resistance was obtained to be the lowest 60.1 Ω/□ when the Sb content was 10%(molar fraction),and the transmission was above 85% in the visible light range.

Key words: ATO films, Sb doping amounts, sol-gel method, transmission, sheet resistance

CLC Number:

TQ135.31

YANG Bao-Ping, ZHONG Xiao-Hua, ZHANG Xiao-Liang, CUI Jin-Feng, JIA Jun-Hong, YI Ge-Wen. Effects of Sb doping amount on structure and transmission,electric property of ATO films[J]. INORGANICCHEMICALSINDUSTRY, 2012, 44(1): 19-.

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Inorganic Acid-Base-Salt Committee of CIESC

Effects of Sb doping amount on structure and transmission,electric property of ATO films

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