关键词: ZnO, p型传导, 喷雾热分解, N-Al共掺, 光致发光

Abstract: p-type N-Al co-doped ZnO thin films were deposited on quartz glass substrates by ultrasonic spray pyrolysis method from a mixed aqueous solution of Zn(CH₃COO)₂ •2H₂O,CH₃COONH₄,and Al(NO₃)₃•9H₂O.Effects of precursor solution concentration,flow rate of carrier gas,and pyrolysis temperature on the experiment result were studied.XRD and SEM were employed to characterize the crystalline structure and surface morphology of prepared ZnO thin films.Results indicated that the ZnO thin films belonged to hexagonal wurtzite structure,had a uniform surface,dense structure,and a strong preferred orientation(002）with the c axis perpendicular to the substrates.Photoluminescence performances and electrical properties of the thin films had been tested and the results indicated that the films were p-type ZnO thin films and their photoluminescence had obvious features of ZnO thin films.

Key words: ZnO, p-type conduction, spray pyrolysis, N-Al co-doping, photoluminescence