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Study on permeability of mesoporous silica antireflective film regulated by conductivity
ZHANG Yu,QI Xiaoyu,FENG Mengyao,SUN Nannan,ZHAO Cuilian
Inorganic Chemicals Industry . 2022, (
8
): 80 -84 . DOI: 10.19964/j.issn.1006-4990.2021-0701