X切铌酸锂晶体铁电畴反转工艺研究

doi:10.19964/j.issn.1006-4990.2024-0670

Abstract

Abstract:

Lithium niobate crystals are extensively applied in multiple fields，due to their excellent electro-optic，acousto-optic，pyroelectric，piezoelectric，and nonlinear optical properties.In this study，X-cut lithium niobate crystals were taken as the research object，and an experimental study on ferroelectric domain inversion induced by an external pulsed electric field was systematically carried out.The process issues encountered during the experiment（unsuccessful polarization，poor electrode adhesion，and difficulty in peeling off photoresist） and the factors affecting the quality of domain inversion were extensively discussed.The success rate and quality of ferroelectric domain inversion were jointly affected by multiple factors such as electric field strength，polarization times，and electrode conditions.The experimental results showed that selecting the Cr electrode and optimizing the magnetron sputtering power（20 W） and deposition rate（12 nm/min） solved the problem of weak electrode adhesion.Replacing acetone with a diluted dimethyl sulfoxide（DMSO） stripping solution successfully stripped the photoresist，resulting in an ideal electrode pattern.By applying a polarization voltage along the Z-direction，under an external voltage of 410 V and 4 repeated polarization cycles，the domain structure inversion was complete and the inverted domain quality was the best.By establishing an optimized process parameter system，the repeatability and stability of domain inversion were improved，which was expected to promote its wider application in optoelectronic devices，acoustic wave devices，and other fields.

Key words: X-cut lithium niobate, domain inversion, domain engineering, external electric field

CLC Number:

O487

CHEN Yuneng, TANG Gongbin, CHEN Kunfeng, XUE Dongfeng. Study on ferroelectric domain inversion in X-cut lithium niobate crystals[J]. Inorganic Chemicals Industry, 2025, 57(11): 31-35.

Figures/Tables 9

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References 30

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Inorganic Acid-Base-Salt Committee of CIESC

Study on ferroelectric domain inversion in X-cut lithium niobate crystals

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