三氯氢硅气相色谱分析条件研究

INORGANICCHEMICALSINDUSTRY ›› 2012, Vol. 44 ›› Issue (9): 51-.

Previous Articles Next Articles

Study on quantitative GC analysis conditions for trichlorosilane

Yang Pei¹，Fan Guoqiang¹，Bai Ying¹，Guo Yongxin¹，Hu Jiaqi²，Ye Shisheng²

1.CNOOC Tianjin Chemical Research & Design Institute，Tianjin 300131；2.Zhejiang Xin′an Chemical Industry Group Co.,Ltd.

Published:2012-09-11

Abstract

Abstract: Analysis conditions of trichlorosilane by gas chromatography were studied，and the optimum analysis conditions of gas chromatography with capillary column for trichlorosilane were comfirmed.The liner range of this analysis method was determined with the defined analysis conditions，and linear correlation was obtained，i.e.R=0.999 93.Parallel and repeated tests were also carried out and results showed the method had good parallelity and repeatability.The relative standard deviation（RSD） of the mass fraction of trichlorosilane was less than 0.02% and the result was satisfied.

Key words: trichlorosilane, gas chromatography, capillary column

CLC Number:

TQ127.2

YANG Pei, FAN Guo-Qiang, BAI Ying, GUO Yong-Xin, HU Jia-Qi, YE Shi-Sheng. Study on quantitative GC analysis conditions for trichlorosilane[J]. INORGANICCHEMICALSINDUSTRY, 2012, 44(9): 51-.

[1]	LI Jiaqiang, LI Jun, JIN Yang, CHEN Ming. A gas chromatographic analysis method for acetic acid content in phosphoric acid and acetic acid mixed system [J]. Inorganic Chemicals Industry, 2023, 55(5): 115-120.
[2]	DUAN Rui, JIA Zhaohang, XU Maolan, MA Tianyue, PENG Wencai, ZHANG Jianshu. Study on thermal chlorination and mechanism of chlorodimethylsilane and trichlorosilane [J]. Inorganic Chemicals Industry, 2023, 55(12): 82-87.
[3]	Yang Dian,Wang Fang,Wan Ye,Sun Qiang,Zhang Zheng,Shi Qinghe. Research progress on separation process of methyl dichlorosilane from trichlorsilane [J]. Inorganic Chemicals Industry, 2021, 53(3): 30-33.
[4]	Guo Huibin. Direct determination of trace dodecyl morpholine by gas chromatography-mass spectrometry [J]. Inorganic Chemicals Industry, 2019, 51(8): 76-78.
[5]	ZHAO Yun, DAN Jian-Ming, HONG Cheng-Lin. Application research of silicon tetrachloride from polysilicon enterprises [J]. INORGANICCHEMICALSINDUSTRY, 2014, 46(7): 11-.
[6]	ZHANG Kai-Shi. Production technology and research progress of trichlorosilane [J]. INORGANICCHEMICALSINDUSTRY, 2011, 43(8): 11-.
[7]	MAO Wei, SU Xiao-Ping, WANG Tie-Yan, YUAN Qin, MO Jie, REN Jian. Experimental study on removing of trichlorosilane in silicon tetrachloride with photochemistry reaction [J]. INORGANICCHEMICALSINDUSTRY, 2010, 0(12): 37-.
[8]	Hu Qinghua;Zhang Weiping;Chen Hao;Wang Jianguo. Influence of doping ratios of Cu2+/TiO2 nanofiber on photocatalytic degradation of CH3Cl [J]. INORGANICCHEMICALSINDUSTRY, 2010, 0(11): 0-0.
[9]	Chen Yufeng. Determination of iodide ions by gas chromatography [J]. INORGANICCHEMICALSINDUSTRY, 2008, 0(5): 0-0.

National Inorganic Salts Information Center

Inorganic Acid-Base-Salt Committee of CIESC

Study on quantitative GC analysis conditions for trichlorosilane

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 9

Metrics

Comments

Recommended 0