两步烧结法对AlN原料提纯工艺的研究
吕令爽, 曹文豪, 俞瑞仙, 王守志, 王国栋, 朱亚军, 杜家宸, 徐现刚, 张雷
Research on purification process of AlN source material by two-step sintering method
LÜ Lingshuang, CAO Wenhao, YU Ruixian, WANG Shouzhi, WANG Guodong, ZHU Yajun, DU Jiachen, XU Xiangang, ZHANG Lei
无机盐工业
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2024, (12): 51
-55
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DOI: 10.19964/j.issn.1006-4990.2024-0367