以正硅酸乙酯（TEOS）为前驱体、甲基三甲氧基硅烷（MTMS）为修饰剂，利用酸催化的方法制备了SiO₂增透膜液。采用浸渍提拉法在玻璃基片上进行镀膜，利用马弗炉对膜层进行固化处理，所得膜层通过冷凝水试验箱和TABER磨耗仪进行了耐水和耐磨测试，从而研究了MTMS的加入量对SiO₂增透膜透过性能及耐候性能的影响。结果表明：适量MTMS的加入可提高SiO₂增透膜的透过性能，当n（MTMS）/n（TEOS）=0.5时，其增透性能由未加MTMS时的5.2%增加到5.8%，增长了11.5%，而随着MTMS加入量的增多，增透性能又会呈现下降的趋势；MTMS的加入还在很大程度上改善了SiO₂增透膜的耐水性能，当n（MTMS）/n（TEOS）≥1时，500 h的冷凝水实验对膜层表面及透过性能几乎无影响；随着MTMS加入量的逐步增加，膜层耐磨性能也会逐步地提升，当n（MTMS）/n（TEOS）=2时，膜层经100次循环摩擦后透过率增加量仅降低10%，相比未加MTMS的膜层而言，其耐磨性能有了大幅提升。

SiO₂ anti-reflective coating solution was prepared by acid-catalyzed method using tetraethyl orthosilicate（TEOS） as precursor and methyltrimethoxysilane（MTMS） as modifier.The film was coated on the glass substrate by dip coating method and curing treated by the muffle furnace，the water and wear resistance test were carried out by condensate test chamber and TABER abrasion meter，also the effect of MTMS addition on the transmittance and weatherability of the coating was studied.The results showed that appropriate amount of MTMS could improve the transmittance of SiO₂ anti-reflective coating.When n（MTMS）/n（TEOS）=0.5，the anti-reflection property was increased by 11.5% from 5.2% to 5.8%，but the anti-reflection property was decreased with the increase of MTMS.The addition of MTMS also improved the water resistance of SiO₂ film to a large extent.When n（MTMS）/n（TEOS）≥1，the condensate test of 500 h had little effect on the surface and transmittance of the film.With the gradual increase of MTMS addition，the wear resistance of the film would gradually increase.When n（MTMS）/n（TEOS）=2，the increase in transmittance of the film after 100 cycles of friction was only reduced by 10%.Compared with the film without MTMS，its wear resistance had been greatly improved.