关键词: MTMS, SiO₂增透膜, 透过性, 耐水性, 耐磨性

Abstract:

SiO₂ anti-reflective coating solution was prepared by acid-catalyzed method using tetraethyl orthosilicate（TEOS） as precursor and methyltrimethoxysilane（MTMS） as modifier.The film was coated on the glass substrate by dip coating method and curing treated by the muffle furnace，the water and wear resistance test were carried out by condensate test chamber and TABER abrasion meter，also the effect of MTMS addition on the transmittance and weatherability of the coating was studied.The results showed that appropriate amount of MTMS could improve the transmittance of SiO₂ anti-reflective coating.When n（MTMS）/n（TEOS）=0.5，the anti-reflection property was increased by 11.5% from 5.2% to 5.8%，but the anti-reflection property was decreased with the increase of MTMS.The addition of MTMS also improved the water resistance of SiO₂ film to a large extent.When n（MTMS）/n（TEOS）≥1，the condensate test of 500 h had little effect on the surface and transmittance of the film.With the gradual increase of MTMS addition，the wear resistance of the film would gradually increase.When n（MTMS）/n（TEOS）=2，the increase in transmittance of the film after 100 cycles of friction was only reduced by 10%.Compared with the film without MTMS，its wear resistance had been greatly improved.

Key words: MTMS, SiO₂ anti-reflective coating, transmittance, water resistance, wear resistance