关键词: 四氟化硅, 气相色谱仪, 傅里叶红外光谱仪, 质谱仪, 微波波谱仪

Abstract: Detecting methods,including gas chromatography,Fourier transform infrared spectroscopy,mass spectrometry，and microwave spectroscopy,for several kinds of impurity in silicon tetrafluoride gas were introduced respectively.Gas chromatograph can detect C₁~C₄ hydrocarbons in silicon tetrafluoride gas;high-resolution Fourier transform infrared spectrometer can detect the impurity gases,such as SiF₃OH,HF,SiF₃H,SiF₂H₂,SiH₃F,CO₂ and CO;microwave spectrometer can detect the impurity gases,such as CHF₃,CH₂F₂,and CH₃F;and mass spectrometer can detect the impurity gases,such as SiF₃H,SiF₂H₂,SiF₃,and OSiF₃.Advantages and disadvantages of each detecting method were found out by comparison at last.

Key words: silicon tetrafluoride, gas chromatograph, Fourier transform infrared spectrometer, mass spectrometer, microwave spectrometer