Study on thermal chlorination and mechanism of chlorodimethylsilane and trichlorosilane
DUAN Rui, JIA Zhaohang, XU Maolan, MA Tianyue, PENG Wencai, ZHANG Jianshu
Inorganic Chemicals Industry . 2023, (12): 82 -87 .  DOI: 10.19964/j.issn.1006-4990.2023-0059