Abstract: Electronic-grade sulphuric acid is widely used in large scale integrated circuit（IC），semiconductor，and other mi- croelectronics industries，for cleaning and etching agents.With the rapid development of microelectronics industry in China，demand for electronic-grade sulphuric acid is growing and it has a very good prospect.Quality standards，preparation technology，detecting methods，applications，and packaging technology of electronic-grade sulphuric acid were reviewed，and the improvements of preparation technology in recent years were introduced in detail.Finally，the future development of electronic-grade sulphuric acid was prospected.

Key words: electronic-grade sulphuric acid, quality standard, preparation technology, detection