Abstract: The uses，quality specifications，and test methods of electronic grade phosphoric acid（EGPA） were introduced.The latest research and production advances of EGPA and the matching technologies for producing EGPA were reviewed.The methods，processes，and features of purifying yellow phosphorus and phosphoric acid for EGPA were expounded.It was pointed out that the technology development trends of EGPA should be the integration of yellow phosphorus purifying and phosphoric acid purifying，and the systematical optimization of purifying procedures in production process，so as to improve purifying efficiency and to reduce producing cost.

Key words: electronic grade phosphoric acid, yellow phosphorus;phosphoric acid