电子级磷酸的纯化技术及其发展现状

Abstract

Abstract: As the semiconductor chip and LCD manufacturing industries have transfered to China,China will gradually become a world′s large LCD industrial base.Demand for electronic-grade phosphoric acid in China is growing, and the expansion of electronic-grade phosphoric acid production has become the inevitable trend of the development of fine phosphate chemical industry at present.Electronic-grade phosphoric acid is widely used in large scale integrated circuit (IC),thin film liquid crystal display (TFT-LCD),semiconductor,and other microelectronics industries.Usually it is used as cleaning and etching agents.Application fields,quality standard,purification technology,and present R&D status of electronic-grade phosphoric acid at home and abroad were introduced in detail.

Key words: phosphoric acid, electronic-grade phosphoric acid, purification technology, present development status

CLC Number:

TQ126.35

LIU Fei, LI Tian-Xiang. Purification technology of electronic-grade phosphoric acid and present development status thereof[J]. INORGANICCHEMICALSINDUSTRY, 2011, 43(3): 11-.

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Inorganic Acid-Base-Salt Committee of CIESC

Purification technology of electronic-grade phosphoric acid and present development status thereof

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