INORGANICCHEMICALSINDUSTRY ›› 2010, Vol. 0 ›› Issue (12): 57-.
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Tang Anjiang,Wei Deju,Gao Shanshan,Guan Xingyu
Published:
Abstract: Detecting methods,including gas chromatography,Fourier transform infrared spectroscopy,mass spectrometry,and microwave spectroscopy,for several kinds of impurity in silicon tetrafluoride gas were introduced respectively.Gas chromatograph can detect C1~C4 hydrocarbons in silicon tetrafluoride gas;high-resolution Fourier transform infrared spectrometer can detect the impurity gases,such as SiF3OH,HF,SiF3H,SiF2H2,SiH3F,CO2 and CO;microwave spectrometer can detect the impurity gases,such as CHF3,CH2F2,and CH3F;and mass spectrometer can detect the impurity gases,such as SiF3H,SiF2H2,SiF3,and OSiF3.Advantages and disadvantages of each detecting method were found out by comparison at last.
Key words: silicon tetrafluoride, gas chromatograph, Fourier transform infrared spectrometer, mass spectrometer, microwave spectrometer
CLC Number:
TQ127.2
TANG An-Jiang, WEI De-Ju, GAO Shan-Shan, GUAN Xing-Yu. Detecting methods for impurities in silicon tetrafluoride gas[J]. INORGANICCHEMICALSINDUSTRY, 2010, 0(12): 57-.
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