四氟化硅生产工艺研究进展

doi:10.11962/1006-4990.2019-0098

Abstract

Abstract:

SiF₄ is used as a raw material for the production of polycrystalline silicon and its derivatives.With the development of information technology and the advancement of silicon-based industry,the demand for SiF₄ is increasing. Meanwhile,the research on production process of SiF₄ has attract more and more attention.Four methods for preparing SiF₄,such as synthetic method of substance containing Si and substance containing F group,hexafluorosilicate pyrogenetic method,hexafluorosilicic acid method and sulfuric acid method,were introduced in details. The research progress in production process of silicon tetrafluoride at home and abroad was summarized.The characteristics of the preparation processes were discussed.The present research showed that the SiF₄ preparation process should develop in the direction of environmental protection,energy saving and high yield.

Key words: silicon tetrafluoride, fluorosilicic acid, hexafluorosilicate, preparation process

CLC Number:

TQ127.2

Wang Xiheng,Sun Wenzhe,Zhang Ling. Research progress in production process of silicon tetrafluoride[J]. Inorganic Chemicals Industry, 2020, 52(1): 35-38.

Figures/Tables 2

References 26

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参数名称	相对分子质量		熔点/ ℃	沸点（0.101 MPa）/℃		气体密度（0.101 MPa, 21.1 ℃）/（kg·m^-3）			气体相对密度（0.101 MPa,21.1 ℃, 空气=1）		临界温度/℃	临界压力/ MPa		临界体积/ （cm³·mol^-1）		临界密度/ （g·cm^-3）		临界压缩系数
参数值	104.079		-86.8	-94.8		4.310			3.594		-14.15	37.2		165		0.630 8		0.285
参数名称	偏心因子	气体定压比热容c_p（25 ℃）/ （kJ·kg^-1·℃^-1）			气体定容比热容c_V（25 ℃）/ （kJ·kg^-1·℃^-1）		气体比热容比 c_p /c_V	气体摩尔生成熵（25 ℃）/ （J·mol^-1·℃^-1）		气体摩尔生成焓（25 ℃）/ （kJ·mol^-1）			气体摩尔吉布斯生成能（25 ℃）/ （kJ·mol^-1）		气体热导率（25 ℃）/ （ J·mol^-1·℃^-1）		液体热导率（25 ℃）/ （W·m^-1·℃^-1）
参数值	0.385	0.704			0.624		1.128	-141.54		-1 615			-1 572.8		0.015 57		0.054 1

氟硅酸盐	分解温度/℃	分解产物	氟硅酸盐	分解温度/℃	分解产物
Li₂SiF₆	240~350	LiF,SiF₄	Cs₂SiF₆	670~800	Cs₃SiF₇,SiF₄
Na₂SiF₆	400~650	NaF,SiF₄	CaSiF₆	200~320	CaF₂,SiF₄
K₂SiF₆	560~850	K₃SiF₇,SiF₄	BaSiF₆	320~480	BaF₂,SiF₄
Rb₂SiF₆	560~850	Rb₃SiF₇,SiF₄

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Inorganic Acid-Base-Salt Committee of CIESC

Research progress in production process of silicon tetrafluoride

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