二氧化钛薄膜制备工艺的研究进展

doi:10.11962/1006-4990.2018-0528

Abstract

Abstract: TiO2 film is an inexpensive semiconductor material with optical and electrical properties，which has attracted wide attention from researchers in recent years.These special properties of TiO2 film make it suitable for many fields.Different preparation processes can obtain TiO2 films with different properties，making them suitable for related fields.The basic characteristics and applications of TiO2 thin films were briefly described.The principle，research status，advantages and disadvantages of electrochemical method，sputtering method，sol-gel method and hydrolysis precipitation method were mainly introduced. According to the shortcomings of each technology，the development trend in the future was pointed out.

Key words: TiO2 thin films；electrochemical method；sputtering method；photocatalysis

CLC Number:

TQ134.11

Zhang Shuai，Zhang Lisheng，Li Hui，Zhang Hanxin，Liang Jinglong. Progress in preparation process of TiO2 thin films[J]. Inorganic Chemicals Industry, 2019, 51(7): 15-18.

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Progress in preparation process of TiO2 thin films

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