In order to enhance the ability of photocatalytic degradation of Rhodamine B solution by nano-TiO₂ films under ultraviolet light,nano-TiO₂ films doped with nonmetal of carbon,metal of nickel and co-doped with nickel and carbon were prepared by magnetron direct current sputtering and radio frequency sputtering with using titanium dioxide target,nickel target and carbon target,respectively.Scanning electron microscopy（SEM）,X-ray diffractometer（XRD） and ultraviolet-visible light spectrophotometer（UV-Vis） were used for characterization.SEM results showed that compared with pure TiO₂ film,the grain size of nickel and carbon co-doped nano-titanium dioxide film was refined,the specific surface area was increased and the surface aggregates of the film were irregular polygonal particles,which was beneficial to increase the contact area with pollutants.XRD results indicated that the crystal grains of the film were reduced,which accelerated the separation of photogenerated electron-hole pairs;the absorption limit of the film was red-shifted and the band gap was reduced.Under ultraviolet light irradiation,nickel and carbon co-doped nano-titanium dioxide films had the best photocatalytic performance,which degraded 29.54% rhodamine B solution in 1 h.