A certain amount of pollutants are generated during the production of anhydrous hydrogen fluoride by fluorite method.These pollutants are fluorine-containing waste in gas,liquid and solid forms.Previously,every production company has its own corresponding treatment measure,but the disposal effect could not meet the requirement of the newest regulation of environmental protection.Aiming at the exhaust gas treatment at present,was improved as follows：the fluoride（in F） content was reduced from 9.0 mg/m³ to 6.0 mg/m³,the sulfur dioxide content in process tail gas was lowered from 550 mg/m³ to 100 mg/m³ and the VOC content of the tailings of baking powder was reduced etc..Through analyzing the causes of pollutants,with readjustment and integrate existing SCR & VOC oxidation techniques,a qualified treatment method for discharge was explored.According to the components property of the exhaust gas,a simple,reliable treatment process was applied to realize energy saving and emission reduction.The process not only meets the enhanced environmental protection requirements and realizes clean production,but also achieves high efficacy,economical rationality and convenient management.