为了增强纳米二氧化钛薄膜在紫外光下光催化降解罗丹明B溶液的能力,分别采用磁控直流溅射与射频溅射的方法,使用二氧化钛靶材、镍靶材、碳靶材,分别制备了碳非金属掺杂、镍金属掺杂以及镍、碳共掺杂的纳米二氧化钛薄膜,并利用扫描电子显微镜（SEM）、X射线衍射仪（XRD）和紫外可见分光光度计（UV-Vis）进行表征。SEM结果表明,与纯二氧化钛薄膜相比镍、碳共掺杂纳米二氧化钛薄膜晶粒细化,比表面积增大,薄膜表面聚集体为不规则的多边形颗粒状,有利于增大与污染物的接触面积;XRD结果表明该薄膜的晶粒减小,加快了光生电子空穴对的分离;薄膜的吸收极限红移,禁带宽度减小。在紫外光照射下,镍、碳共掺杂纳米二氧化钛薄膜的光催化性能最优,1 h降解了29.54%的罗丹明B溶液。

In order to enhance the ability of photocatalytic degradation of Rhodamine B solution by nano-TiO₂ films under ultraviolet light,nano-TiO₂ films doped with nonmetal of carbon,metal of nickel and co-doped with nickel and carbon were prepared by magnetron direct current sputtering and radio frequency sputtering with using titanium dioxide target,nickel target and carbon target,respectively.Scanning electron microscopy（SEM）,X-ray diffractometer（XRD） and ultraviolet-visible light spectrophotometer（UV-Vis） were used for characterization.SEM results showed that compared with pure TiO₂ film,the grain size of nickel and carbon co-doped nano-titanium dioxide film was refined,the specific surface area was increased and the surface aggregates of the film were irregular polygonal particles,which was beneficial to increase the contact area with pollutants.XRD results indicated that the crystal grains of the film were reduced,which accelerated the separation of photogenerated electron-hole pairs;the absorption limit of the film was red-shifted and the band gap was reduced.Under ultraviolet light irradiation,nickel and carbon co-doped nano-titanium dioxide films had the best photocatalytic performance,which degraded 29.54% rhodamine B solution in 1 h.