无机盐工业
主管:中海油天津化工研究设计院有限公司
主办:中海油天津化工研究设计院有限公司
   中海油炼油化工科学研究院(北京)有限公司
   中国化工学会无机酸碱盐专业委员会
ISSN 1006-4990 CN 12-1069/TQ
综述与专论

分离三氯氢硅中甲基二氯硅烷的研究进展

  • 杨典 ,
  • 王芳 ,
  • 万烨 ,
  • 孙强 ,
  • 张征 ,
  • 时庆合
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  • 洛阳中硅高科技有限公司,多晶硅材料制备技术国家工程实验室,河南洛阳 471000
杨典(1988— ),男,硕士,工程师,从事精细化工分离研究;E-mail:yangdian1990@163.com

收稿日期: 2020-09-22

  网络出版日期: 2021-03-11

基金资助

河南省科技研发专项(174200510014)

Research progress on separation process of methyl dichlorosilane from trichlorsilane

  • Dian Yang ,
  • Fang Wang ,
  • Ye Wan ,
  • Qiang Sun ,
  • Zheng Zhang ,
  • Qinghe Shi
Expand
  • National Engineering Laboratory for the Preparation of Polysilicon Materials,China Silicon Cprporation Ltd.,Luoyang 471000,China

Received date: 2020-09-22

  Online published: 2021-03-11

摘要

三氯氢硅中的甲基二氯硅烷含量会严重影响多晶硅的品质,控制三氯氢硅中的甲基二氯硅烷含量对多晶硅的品质具有重要意义。重点介绍了三氯氢硅中甲基二氯硅烷的深度去除方法,包括常规精馏法、吸附法、反应精馏法和萃取精馏法。对比分析了上述方法的优缺点,其中吸附法、反应精馏法是分离甲基二氯硅烷行之有效的方法,萃取精馏法也是分离甲基二氯硅烷的重要研究方向,并对这些工艺的发展方向进行了展望。

本文引用格式

杨典 , 王芳 , 万烨 , 孙强 , 张征 , 时庆合 . 分离三氯氢硅中甲基二氯硅烷的研究进展[J]. 无机盐工业, 2021 , 53(3) : 30 -33 . DOI: 10.11962/1006-4990.2020-0217

Abstract

The content of methyl dichlorosilane in trichlorosilane would seriously affect the quality of polysilicon,therefore,the control of methyl dichlorosilane has been significant on the quality of polysilicon.The effectual removal process of methyl dichlorosilane impurity including conventional distillation,adsorption,reaction distillation and extractive distillation method was emphatically summarized.Advantages and disadvantages of these above methods were compared and analyzed.Adsorption and reactive distillation process were effective separation technology of methyl dichlorosilane.Furthermore,extractive distilla-tion has been an important research field in separation of methyl dichlorosilane.Finally,the development trends of those separation process was prospected.

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