分离三氯氢硅中甲基二氯硅烷的研究进展
收稿日期: 2020-09-22
网络出版日期: 2021-03-11
基金资助
河南省科技研发专项(174200510014)
Research progress on separation process of methyl dichlorosilane from trichlorsilane
Received date: 2020-09-22
Online published: 2021-03-11
杨典 , 王芳 , 万烨 , 孙强 , 张征 , 时庆合 . 分离三氯氢硅中甲基二氯硅烷的研究进展[J]. 无机盐工业, 2021 , 53(3) : 30 -33 . DOI: 10.11962/1006-4990.2020-0217
The content of methyl dichlorosilane in trichlorosilane would seriously affect the quality of polysilicon,therefore,the control of methyl dichlorosilane has been significant on the quality of polysilicon.The effectual removal process of methyl dichlorosilane impurity including conventional distillation,adsorption,reaction distillation and extractive distillation method was emphatically summarized.Advantages and disadvantages of these above methods were compared and analyzed.Adsorption and reactive distillation process were effective separation technology of methyl dichlorosilane.Furthermore,extractive distilla-tion has been an important research field in separation of methyl dichlorosilane.Finally,the development trends of those separation process was prospected.
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