大屏幕液晶显示器和集成电路等微电子工业的湿法蚀刻和湿法清洗工艺以电子级磷酸为原料,会产生大量含铝离子的磷酸废液。用阳离子交换树脂（Zminw-0705）对该磷酸废液在动态情况下做了处理,研究了动态情况下设备参数和操作参数对吸附效果的影响。采用傅里叶红外光谱法和X射线光电子能谱对吸附前后的树脂做了表征,验证了吸附反应的发生。用模型对动态吸附过程做了拟合,实际吸附量与理论吸附量比较接近,相关系数均在0.92以上。结果表明：在其他条件相同的情况下,150∶8为离子交换柱适宜长径比;适宜温度范围为45~55 ℃;适宜进料流速为4.67 mL/min;废酸的磷酸浓度和铝离子也在适合的操作范围内。

Wet etching and wet cleaning processes in microelectronics industry such as large-screen LCD and integrated circuits use electronic grade phosphoric acid as raw material to produce a large amount of waste phosphoric acid containing aluminum ions.The phosphoric acid waste was treated by cation exchange resin（Zminw-0705） under dynamic condition,and the influence of equipment parameters and operation parameters on adsorption effect was studied.The resin before and after adsorption was characterized by Fourier infrared spectroscopy and X-ray photoelectron spectroscopy.The model was used to fit the dynamic adsorption process.The actual adsorption capacity was close to the theoretical adsorption capacity,and the correlation coefficient was above 0.92.Results showed that under the same conditions,150∶8 was the suitable length-diameter ratio of cation exchange column;the appropriate temperature range was at 45~55 ℃;the optimal feed flow rate was 4.67 mL/min.The phosphoric acid concentration of the waste acid and aluminum ions were also within the appropriate operating range.