四氟化硅作为生产多晶硅及其衍生物的原料,随着电子工业的发展以及硅基产业的扩大,对于四氟化硅的需求量逐渐增加。对四氟化硅生产工艺的研究越来越引起人们的重视。详细介绍了制备四氟化硅的4种方法,含硅源物质与含氟基团物质合成法、氟硅酸盐热解法、氟硅酸法、硫酸法,综述了国内外制备四氟化硅的研究进展情况,并评述了各工艺的特点。就目前研究表明,四氟化硅制备工艺需向环保、节能、高收率方向发展。

SiF₄ is used as a raw material for the production of polycrystalline silicon and its derivatives.With the development of information technology and the advancement of silicon-based industry,the demand for SiF₄ is increasing. Meanwhile,the research on production process of SiF₄ has attract more and more attention.Four methods for preparing SiF₄,such as synthetic method of substance containing Si and substance containing F group,hexafluorosilicate pyrogenetic method,hexafluorosilicic acid method and sulfuric acid method,were introduced in details. The research progress in production process of silicon tetrafluoride at home and abroad was summarized.The characteristics of the preparation processes were discussed.The present research showed that the SiF₄ preparation process should develop in the direction of environmental protection,energy saving and high yield.