二氧化钛薄膜是一种具有光、电特性的廉价的半导体材料，近年来受到研究人员的广泛关注，二氧化钛薄膜的这些特殊性能使其应用于诸多领域。不同的制备工艺可以得到性能不同的二氧化钛薄膜，使其适用于相关领域。简要叙述了二氧化钛薄膜的基本特性及应用，主要介绍了电化学法、溅射法、溶胶-凝胶法和水解沉淀法等二氧化钛薄膜制备工艺的原理、研究现状和优缺点，并根据各工艺的不足，指出了今后的发展趋势。

TiO2 film is an inexpensive semiconductor material with optical and electrical properties，which has attracted wide attention from researchers in recent years.These special properties of TiO2 film make it suitable for many fields.Different preparation processes can obtain TiO2 films with different properties，making them suitable for related fields.The basic characteristics and applications of TiO2 thin films were briefly described.The principle，research status，advantages and disadvantages of electrochemical method，sputtering method，sol-gel method and hydrolysis precipitation method were mainly introduced. According to the shortcomings of each technology，the development trend in the future was pointed out.