Abstract: High purity barium titanate（BaTiO3）powder was prepared by sonochemical method with barium chloride and butyl titanate as the raw materials. The sample was characterized by X-ray diffraction，SPM，and laser size analyzer etc..The sonochemical method and its effecting factors for preparation of high purity barium titanate were studied.The influences of sonochemical method and the conventional precipitation method on the particle size of the powder were compared.Results showed that when control the reaction pH at about 3， and control the amount-of-substance ratio of Ba to Ti at 1∶（1～1.02）， nano-particles prepared through this method belonged to cubic crystal structure，and it was in uniform sphere shape with diameter of 100 nm and purity of  99.82%.

Key words: sonochemical method, high purity barium titanate, barium chloride