Abstract: In order to realize the comprehensive utilization for the silicon fluoride compounds by-produced in the fluorine absorption system of WPA（wet process phosphoric acid） concentration unit of phosphate fertilizer enterprises，and to resolve the fluorine absorption system′s silica gel blocking problem at the same time，silicon fluoride compounds were processed into the basic chemical raw material anhydrous hydrogen fluoride.The low concentration ammonium fluoride solution obtained from the washing of silica in the production process，was returned to fluorine absorption system of phosphate fertilizer production for the supplement of absorption liquid of fluorinated tail gas，acid hydrolysis residue went back to the extraction system of phosphate fertilizer production for equivalent use，and silica was applied for rubber filler after activation.Results showed this technology realized the comprehensive utilization of silicon-fluorine resources and cleaner production of phosphate fertilizer enterprises.

Key words: phosphoric acid concentration；fluorine absorption system；silicon fluoride compounds；silica gel blocking, cleaner production