Abstract: Plumbum strontium titanate （PST） thin film is a  kind of important ferroelectric thin film.Strontium-doped plumbum titanate was grown on Si（100） substrate by sol-gel method.Effect of different strontium-doped contents and annealing temperatures on crystallization properties of the films were investigated by XRD and AFM etc..Results showed that strontium-doped content had great effect on microstructure and morphology of the films.The c/a, unit cell volume,and crystallization temperature were all decreased with the increasing of strontium-doped content from XRD spectrogram.In addition,AFM analysis showed that as the increasing of annealing temperature,crystallization properties were promoted,and particle size and roughness of the films were increased.