Abstract: Analysis conditions of trichlorosilane by gas chromatography were studied，and the optimum analysis conditions of gas chromatography with capillary column for trichlorosilane were comfirmed.The liner range of this analysis method was determined with the defined analysis conditions，and linear correlation was obtained，i.e.R=0.999 93.Parallel and repeated tests were also carried out and results showed the method had good parallelity and repeatability.The relative standard deviation（RSD） of the mass fraction of trichlorosilane was less than 0.02% and the result was satisfied.

Key words: trichlorosilane, gas chromatography, capillary column