分离三氯氢硅中甲基二氯硅烷的研究进展

doi:10.11962/1006-4990.2020-0217

摘要/Abstract

摘要：

三氯氢硅中的甲基二氯硅烷含量会严重影响多晶硅的品质,控制三氯氢硅中的甲基二氯硅烷含量对多晶硅的品质具有重要意义。重点介绍了三氯氢硅中甲基二氯硅烷的深度去除方法,包括常规精馏法、吸附法、反应精馏法和萃取精馏法。对比分析了上述方法的优缺点,其中吸附法、反应精馏法是分离甲基二氯硅烷行之有效的方法,萃取精馏法也是分离甲基二氯硅烷的重要研究方向,并对这些工艺的发展方向进行了展望。

关键词: 三氯氢硅, 甲基二氯硅烷, 吸附, 反应精馏, 萃取精馏

Abstract:

The content of methyl dichlorosilane in trichlorosilane would seriously affect the quality of polysilicon,therefore,the control of methyl dichlorosilane has been significant on the quality of polysilicon.The effectual removal process of methyl dichlorosilane impurity including conventional distillation,adsorption,reaction distillation and extractive distillation method was emphatically summarized.Advantages and disadvantages of these above methods were compared and analyzed.Adsorption and reactive distillation process were effective separation technology of methyl dichlorosilane.Furthermore,extractive distilla-tion has been an important research field in separation of methyl dichlorosilane.Finally,the development trends of those separation process was prospected.

Key words: trichlorosilane, methyl dichlorosilane, adsorption, reactive distillation, extractive distillation

中图分类号:

TQ127.2

杨典,王芳,万烨,孙强,张征,时庆合. 分离三氯氢硅中甲基二氯硅烷的研究进展[J]. 无机盐工业, 2021, 53(3): 30-33.

Yang Dian,Wang Fang,Wan Ye,Sun Qiang,Zhang Zheng,Shi Qinghe. Research progress on separation process of methyl dichlorosilane from trichlorsilane[J]. Inorganic Chemicals Industry, 2021, 53(3): 30-33.

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